SEM Cathodoluminescence (SEM-CL) Analyses for Materials Applications

Presented: October 6, 2021

SEM-CL is a powerful tool to examine both structural and optical properties of materials with spatial resolutions below the wavelength of light.  The SEM spatial resolution is on the order of nm, while the CL spatial resolution can be as good as 20nm.  This high spatial resolution of the signal acquisition can then be combined with the high spectral resolution (sub nm in wavelength) of the emitted light to determine a variety of material properties, such as composition, crystal defects and type, strain, and even doping concentrations both qualitatively and quantitatively.  This kind of highly localized analysis is quickly becoming a necessity with discrete devices becoming smaller and smaller such that other standard techniques, such as SIMS, are no longer viable.

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In this webinar we will cover:

  • basics of SEM-CL measurements
  • Introduce the state of the art SEM-CL equipment available at EAG
  • Examples of current applications
  • Combining SEM-CL with STEM data

Please view all of our webinars here.

About the Presenter:


Michael Salmon, Ph.D., Scientific Fellow – Advanced Imaging Group
Dr. Mike Salmon joined EAG Labs in 2007 as a Scientist. Mike earned his Ph D. degree in Materials Science and Engineering from North Carolina State University (NCSU) with an emphasis on microscopy and surface analysis. Over his career at EAG, Mike has focused on highly localized characterization and failure analysis, primarily of compound semiconductors, utilizing Focused Ion Beam (FIB), Scanning Electron Microscopy (SEM), Scanning Transmission Electron Microscopy (STEM), Electron Beam Induced Current (EBIC), and Cathodoluminescence (CL). Over his career with EAG, he has helped publish several journal articles and has given many presentations to a wide variety of industrial and academic audiences regarding materials analysis and FA of compound semiconductors.