SMART Chart Webinar Series: AES

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Auger Electron Spectroscopy is a versatile analytical technique that is especially useful for analyzing and identifying very small features. With a beam diameter on the order of 10nm and a shallow escape depth on the same dimension or lower, this technique can analyze the smallest volume of material of any technique. Auger can detect all elements except H and He with a detection limit as low as 0.1% atomic. Typical analyses can produce surveys for elements, lateral line scans or elemental maps of elemental intensities across the analyzed area, and also compositional depth profiles. It is a semi-quantitative technique that can be further calibrated for better accuracy with the use of standards. Auger is commonly used for identifying small particles and other defects on metals, alloys, semiconductors and MEMS devices. It is also used to determine critical oxide thicknesses of important industrial alloys such as electropolished stainless steel and nitinol, hence it is particularly relevant to the implantable medical device industry. It is an excellent complementary technique to the more widely used SEM-EDS. It has proven to be a versatile technique for many problem-solving scenarios, using the combination of excellent imaging, good sensitivity and in-depth analysis.

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About the Presenter:

BradBurrowBrad Burrow, Ph.D., Specialist
Brad Burrow obtained his Ph.D. in Analytical Chemistry from the University of Arizona where his thesis involved materials characterization of lithium-silicon alloys for use as the anode in primary thermal batteries. After a stint as a staff scientist with Philips Research Labs Sunnyvale working with metal silicides, aluminum bondpads and other silicon-based semiconductor materials, he has since provided AES, XPS, AFM, RBS, TXRF and Quad SIMS services for external clients at several analytical service labs, including EAG Labs where he has provided Auger analysis for over thirteen years. During this time, he has supported a wide variety of industries including semiconductor, semiconductor manufacturing equipment, medical, MEMS, optoelectronic, solar and others.

This webinar will serve as an introduction to Auger Electron Spectroscopy. It will include the principles of the technique and provide several examples of its application.

In this webinar we will cover:

  • How the technique works
  • Instrumentation
  • Sample requirements
  • Examples of analyses that include surveys, Auger maps and depth profiles
  • Strengths and limitations of the technique.