SMART Chart Webinar Series: RBS

Rutherford Backscattering Spectrometry (RBS)

Presented: Wednesday, May 13, 2020

SMART-Chart-RBS-1Let's take a deeper dive into our SMART Chart!

Rutherford Backscattering Spectrometry (RBS) is a thin film analysis technique which is performed by bombarding a sample with a monoenergetic beam of ions with an energy of a few MeV. The resultant backscattered ions are used to determine the matrix composition and thickness of thin films and thin film structures. RBS is unique in that it is quantitatively accurate without standards, can perform nondestructive depth profiling, and can measure the hydrogen content in samples, in addition to nearly all of the elements of the periodic table.

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About the Presenter:

daniel-tsengDaniel Tseng, Ph.D., Senior Scientist
Daniel Tseng has over 14 years of experience with RBS for thin film materials characterization for a wide variety of semiconductor and non-semiconductor applications. Daniel has a Ph.D. in Chemical Physics from Washington State University, and has a background in the semiconductor industry in materials development and equipment. He has been an instructor for EAG’s Working Smarter Technical Seminar.

This webinar will describe fundamental principles of RBS, along with a diverse set of examples to provide you with an understanding of its applicability as a materials characterization tool.

In this webinar we will cover:

  • Principles of the technique
  • Common uses
  • Sample requirements
  • Several real-world examples demonstrating:
    • Film composition measurements
    • Hydrogen forward scattering
    • Thin film characterization
  • Strengths and limitations of the technique