Scanning Microwave Impedance Microscopy (sMIM)

Presented by EAG Laboratories and PrimeNano

smim-c-imageUnderstanding the electrical properties of materials with nanoscale precision is crucial in many industrial and academic applications. In this webinar, PrimeNano Inc. in collaboration with EAG Laboratories, will be presenting information on scanning Microwave Impedance Microscopy (sMIM) operation and detailing several case studies. sMIM is a near-field Atomic Force Microscopy (AFM) based technique that provides electrical property information of materials at the nanoscale and the technique has just been launched as a service by EAG.

scanwaveIn sMIM, a custom AFM tip is used both as a microwave source and a reflected signal collector. The reflected signal in turn provides the local capacitive and conductivity information about the material under measurement. Since sMIM inherently measures the capacitance of the sample this makes it an excellent method for characterizing a wide range of materials such as insulators, semiconductors, 1D/2D structures, ferroelectric materials and others. In this webinar, the operation of sMIM will be described and several case studies will be presented. In the case studies presented, sMIM has been able to provide information that is difficult or impossible to collect by any other means making it an invaluable tool in investigating various semiconductor devices and emerging material systems.

Please view all of our webinars here.

About the Presenters:

sara-ostrowski2Sara G Ostrowski, Ph.D., Surface Properties Manager, EAG Laboratories
Dr. Sara Ostrowski has over ten years of experience with AFM and OP for a wide array of material types and applications. Sara has a Ph.D. in Analytical Chemistry from Penn State University where she studied phospholipid distribution in biological cell membranes using chemical imaging. She worked for five years at General Electric’s Global Research Center supporting R&D efforts with materials characterization. She is celebrating ten years at EAG.


Ravi Chintala, Ph.D., Application Scientist, PrimeNano Inc.
Dr. Ravi Chintala has more than 10 years of research experience on scanning probe microscopy, focusing specifically on various electrical SPM techniques. Before starting his career as an Application Scientist at PrimeNano,Inc., Dr. Chintala was a postdoctoral fellow at Lawrence Berkeley National Laboratory investigating nanoscale charge carrier dynamics of solar cells using KPFM. Dr. Chintala has obtained his PhD from IMEC, (Belgium) and MS from Michigan Technological University (Houghton, MI).

In this webinar we will cover:

  • Introduction to Scanning Microwave Impedance Microscopy (sMIM)
  • PrimeNano sMIM implementation
  • Case Studies
    • Dopant concentration and type
    • FinFETs
    • Buried structures
    • Carbon nanotubes
    • Emerging new materials