Spectroscopic Ellipsometry

Presented: Wednesday, July 22, 2020

Let's take a deeper dive into our SMART Chart!

ellipsometrydataSpectroscopic Ellipsometry (SE) is a powerful analytical tool for the characterization of thin films in many materials, including semiconductors, dielectric films, metals and polymers. SE is a non-contact, non-destructive optical technique, which measures the polarization change of reflected or transmitted light after interaction with a sample. This change in polarization is related to material properties.

SMART-Chart-EllipsometryEllipsometry is primarily used to measure film thickness, the refractive index (n) and the extinction coefficient (k), but it can also be employed to investigate other properties that affect the polarization of light, such as roughness, optical anisotropy (birefringence), crystalline nature, composition, optical bandgap, and thermal expansion. In order to determine these parameters, a model is constructed that describes the optical parameters of the sample. Then, the unknown parameters are fitted to obtain a best match between the theoretical response and the experimental data. Measurement precision is excellent and can be better than 0.1nm for thickness and better than 0.001 for n and k. 

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About the Presenter:

pieterdebokxPieter de Bokx, Ph.D., Senior Specialist
Dr. Pieter de Bokx obtained MSc and PhD degrees in Chemistry, both from Utrecht University in The Netherlands. He worked in research on analytical instrumentation at the Philips Research Labs between 1985 and 2000. Pieter joined Eurofins-EAG in 2000 when it was the Royal Philips Materials Analysis laboratory. He has over 30 years experience in a variety of analytical techniques including chromatography, ellipsometry and x-ray spectrometry.


In this webinar we will cover:

  • Physical background of ellipsometry
  • Operating principles
  • Real-world examples
  • Strengths and limitations